Ali Khounsary : rechercher sur Z-Library

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Campagne de collecte 15 septembre 2024 – 1 octobre 2024

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1

SPIE Proceedings [SPIE SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation - San Diego, CA (Sunday 11 July 1993)] High Heat Flux Engineering II - Infrared missile domes: heat flux and thermal shock

Klein, Claude A., Khounsary, Ali M.

Année:

1993

Langue:

english

Fichier:

PDF, 1016 KB

english, 1993

2

SPIE Proceedings [SPIE Optics & Photonics 2005 - San Diego, California, USA (Sunday 31 July 2005)] Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II - Compact source and beam delivery system for EUV radiation using a Schwarzschild objective

Mann, K., Kyrala, George A., Gauthier, Jean-Claude J., Barkusky, F., Bayer, A., MacDonald, Carolyn A., Khounsary, Ali M., Peth, C., Toettger, H., Feigl, T., Kaiser, N.

Année:

2005

Langue:

english

Fichier:

PDF, 1.22 MB

english, 2005

3

SPIE Proceedings [SPIE Optics & Photonics 2005 - San Diego, California, USA (Sunday 31 July 2005)] Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II - Applications of highly oriented pyrolytic graphite (HOPG) for x-ray diagnostics and spectroscopy

Legall, Herbert, Kyrala, George A., Gauthier, Jean-Claude J., Stiel, Holger, Nickles, Peter-Victor, MacDonald, Carolyn A., Khounsary, Ali M., Bjeoumikhov, Aniouar A., Langhoff, Norbert, Haschke, Micha

Année:

2005

Langue:

english

Fichier:

PDF, 546 KB

english, 2005

4

SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Laser-Generated and Other Laboratory X-Ray and EUV Sources, Optics, and Applications - Efficiency of 1.5- to 4.5-keV x-ray production from laser plasmas

Tallents, Greg J., Pestehe, Jalal, Turcu, Edmond, Abou-Ali, Y., Hirst, Graeme J., Powers, Michael F., Shaikh, Waseem, Kyrala, George A., Gauthier, Jean-Claude J., MacDonald, Carolyn A., Khounsary, Ali

Année:

2004

Langue:

english

Fichier:

PDF, 102 KB

english, 2004

5

SPIE Proceedings [SPIE Optical Science, Engineering and Instrumentation '97 - San Diego, CA (Sunday 27 July 1997)] High Heat Flux and Synchrotron Radiation Beamlines - Thermal contact resistance across a copper-silicon interface

Khounsary, Ali M., Chojnowski, David, Assoufid, Lahsen, Worek, William M., Macrander, Albert T., Khounsary, Ali M.

Année:

1997

Langue:

english

Fichier:

PDF, 464 KB

english, 1997

6

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 25 August 2013)] Advances in X-Ray/EUV Optics and Components VIII - Development of a numerically controlled elastic emission machining system for fabricating mandrels of ellipsoidal focusing mirrors used in soft x-ray microscopy

Takei, Yoshinori, Kume, Takehiro, Motoyama, Hiroto, Hiraguri, Kentaro, Hashizume, Hirokazu, Mimura, Hidekazu, Khounsary, Ali, Goto, Shunji, Morawe, Christian

Année:

2013

Langue:

english

Fichier:

PDF, 1.22 MB

english, 2013

7

SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications - Multilayer mirror design for different applications in the XUV using a versatile simulation program

Graf, Thomas G., Michette, Alan G., Powell, A. Keith, Khounsary, Ali M., Dinger, Udo, Ota, Kazuya

Année:

2004

Langue:

english

Fichier:

PDF, 573 KB

english, 2004

8

SPIE Proceedings [SPIE San Diego '92 - San Diego, CA (Sunday 19 July 1992)] High Heat Flux Engineering - Enhanced heat-transfer techniques for high heat flux boiling

Bergles, Arthur E., Khounsary, Ali M.

Année:

1993

Langue:

english

Fichier:

PDF, 545 KB

english, 1993

9

Guest Editorial: Special Section on High Heat Flux Optical Engineering

Khounsary, Ali M.

Journal:

Optical Engineering

Année:

1995

Langue:

english

Fichier:

PDF, 51 KB

english, 1995

10

Performance analysis of high-power synchrotron x-ray monochromators

Khounsary, Ali M.

Journal:

Optical Engineering

Année:

1990

Langue:

english

Fichier:

PDF, 386 KB

english, 1990

11

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 9 August 2015)] Advances in X-Ray/EUV Optics and Components X - 2D and 3D micro-XRF based on polycapillary optics at XLab Frascati

Goto, Shunji, Morawe, Christian, Khounsary, Ali M., Polese, C., Cappuccio, G., Dabagov, S. B., Hampai, D., Liedl, A., Pace, E.

Année:

2015

Langue:

english

Fichier:

PDF, 7.59 MB

english, 2015

12

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 9 August 2015)] Advances in X-Ray/EUV Optics and Components X - MZP design and fabrication for efficient hard x-ray nano-focusing and imaging

Goto, Shunji, Morawe, Christian, Khounsary, Ali M., Eberl, Christian, Osterhoff, Markus, Döring, Florian, Krebs, Hans-Ulrich

Année:

2015

Langue:

english

Fichier:

PDF, 6.12 MB

english, 2015

13

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, CA (Sunday 2 August 2009)] Advances in X-Ray/EUV Optics and Components IV - Methods to improve the accuracy of the surface reconstruction with a Fizeau interferometer

Vidal, Josep, Khounsary, Ali M., Morawe, Christian, Nicolas, Josep, Campos, Juan, Goto, Shunji

Année:

2009

Langue:

english

Fichier:

PDF, 1.04 MB

english, 2009

14

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 17 August 2014)] Advances in X-Ray/EUV Optics and Components IX - Front Matter: Volume 9207

Morawe, Christian, Khounsary, Ali M., Goto, Shunji, SPIE, Proceedings of

Année:

2014

Langue:

english

Fichier:

PDF, 387 KB

english, 2014

15

SPIE Proceedings [SPIE Optical Science and Technology, the SPIE 49th Annual Meeting - Denver, CO (Monday 2 August 2004)] Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II - How and why side cooling of high-heat-load optics works

Li, Yaming, Khounsary, Ali M., Nair, Sudhakar, Khounsary, Ali M., Dinger, Udo, Ota, Kazuya

Année:

2004

Langue:

english

Fichier:

PDF, 1.07 MB

english, 2004

16

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 1 August 2010)] Adaptive X-Ray Optics - On-orbit adjustment concepts for the Generation-X Observatory

Schwartz, Daniel A., Khounsary, Ali M., O'Dell, Stephen L., Brissenden, Roger, Freeman, Mark, Restaino, Sergio R., Gaetz, Terrance, Gorenstein, Paul, Jerius, Diab, Juda, Michael, Reid, Paul, Wolk, Sco

Année:

2010

Langue:

english

Fichier:

PDF, 814 KB

english, 2010

17

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 12 August 2012)] Advances in X-Ray/EUV Optics and Components VII - Front Matter: Volume 8502

SPIE, Proceedings of, Goto, Shunji, Morawe, Christian, Khounsary, Ali M.

Année:

2012

Langue:

english

Fichier:

PDF, 313 KB

english, 2012

18

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 24 January 2004)] Micromachining Technology for Micro-Optics and Nano-Optics II - At the limit of nondispersive micro- and nanofocusing mirror optics

Ice, Gene E., Johnson, Eric G., Nordin, Gregory P., Specht, Eliot D., Tischler, Jonathan Z., Khounsary, Ali M., Assoufid, Lahsen, Liu, Chian

Année:

2004

Langue:

english

Fichier:

PDF, 600 KB

english, 2004

19

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 21 August 2011)] Advances in X-Ray/EUV Optics and Components VI - Front Matter: Volume 8139

SPIE, Proceedings of, Morawe, Christian, Khounsary, Ali M., Goto, Shunji

Année:

2011

Langue:

english

Fichier:

PDF, 1.37 MB

english, 2011

20

SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 10 August 2008)] Advances in X-Ray/EUV Optics and Components III - Opto-mechanical design considerations for the Linac Coherent Light Source x-ray mirror system

McCarville, T. J., Goto, Shunji, Khounsary, Ali M., Stefan, P. M., Woods, B., Morawe, Christian, Bionta, R. M., Soufli, R., Pivovaroff, M. J.

Année:

2008

Langue:

english

Fichier:

PDF, 470 KB

english, 2008

21

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 12 August 2012)] Advances in X-Ray/EUV Optics and Components VII - Automated finishing of diamond turned dies for hard x-ray and EUV optics replication

Beaucamp, Anthony T. H., Namba, Yoshiharu, Freeman, Richard R., Goto, Shunji, Morawe, Christian, Khounsary, Ali M.

Année:

2012

Langue:

english

Fichier:

PDF, 1.27 MB

english, 2012

22

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 1 August 2010)] Advances in X-Ray/EUV Optics and Components V - Improved synchrotron performance from indium antimonide crystals

Khounsary, Ali M., Yates, Brian, Hu, Yongfeng, Morawe, Christian, Goto, Shunji, Nagarkal, Vinay

Année:

2010

Langue:

english

Fichier:

PDF, 6.47 MB

english, 2010

23

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 12 August 2012)] Adaptive X-Ray Optics II - X-ray wavefront characterization with two-dimensional wavefront sensors: shearing interferometers and Hartmann wavefront sensors

Baker, Kevin L., Khounsary, Ali M., O'Dell, Stephen L., Bifano, Thomas G.

Année:

2012

Langue:

english

Fichier:

PDF, 1.05 MB

english, 2012

24

SPIE Proceedings [SPIE SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation - Denver, CO (Sunday 4 August 1996)] High Heat Flux Engineering III - Brazing copper to dispersion-strengthened copper

Ryding, David G., Allen, Douglas, Lee, Richard H., Khounsary, Ali M.

Année:

1996

Langue:

english

Fichier:

PDF, 888 KB

english, 1996

25

SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Laser-Generated and Other Laboratory X-Ray and EUV Sources, Optics, and Applications - Compact electron-based EUV and ultrashort hard x-ray sources

Egbert, Andre, Chichkov, Boris N., Kyrala, George A., Gauthier, Jean-Claude J., MacDonald, Carolyn A., Khounsary, Ali M.

Année:

2004

Langue:

english

Fichier:

PDF, 660 KB

english, 2004

26

SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 10 August 2008)] Advances in X-Ray/EUV Optics and Components III - Enhanced reflectivity and stability of high-temperature LPP collector mirrors

Feigl, Torsten, Goto, Shunji, Khounsary, Ali M., Yulin, Sergiy, Perske, Marco, Morawe, Christian, Pauer, Hagen, Schürmann, Mark, Kaiser, Norbert, Böwering, Norbert R., Khodykin, Oleg V., Fomenkov, Igo

Année:

2008

Langue:

english

Fichier:

PDF, 632 KB

english, 2008

27

SPIE Proceedings [SPIE Optical Science and Technology, the SPIE 49th Annual Meeting - Denver, CO (Monday 2 August 2004)] Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II - Fabrication technology of ultraprecise mirror optics to realize hard x-ray nanobeam

Yamauchi, Kazuto, Khounsary, Ali M., Dinger, Udo, Yamamura, Kazuya, Mimura, Hidekazu, Ota, Kazuya, Sano, Yasuhisa, Matsuyama, Satoshi, Yumoto, Hirokatsu, Ueno, Kazumasa, Shibahara, Masafumi, Endo, Kat

Année:

2004

Langue:

english

Fichier:

PDF, 346 KB

english, 2004

28

SPIE Proceedings [SPIE SPIE's International Symposium on Optical Science, Engineering, and Instrumentation - Denver, CO (Sunday 18 July 1999)] X-Ray Optics Design, Performance, and Applications - Asymmetrically cut crystals as optical elements for coherent synchrotron radiation conditioning

Souvorov, Alexei, Khounsary, Ali M., Freund, Andreas K., Ishikawa, Tetsuya, Srajer, George, Lang, Jonathan C.

Année:

1999

Langue:

english

Fichier:

PDF, 481 KB

english, 1999

29

SPIE Proceedings [SPIE Optical Science and Technology, the SPIE 49th Annual Meeting - Denver, CO (Monday 2 August 2004)] Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II - Fabrication of aspherical mirrors for EUV projection optics set-3 of HiNA

Oshino, Tetsuya, Khounsary, Ali M., Dinger, Udo, Takahashi, Shin-ichi, Yamamoto, Takahiro, Ota, Kazuya, Miyoshi, Tatsuro, Shiraishi, Masayuki, Komiya, Takaharu, Kandaka, Noriaki, Kondo, Hiroyuki, Mash

Année:

2004

Langue:

english

Fichier:

PDF, 480 KB

english, 2004

30

SPIE Proceedings [SPIE Optical Science and Technology, the SPIE 49th Annual Meeting - Denver, CO (Monday 2 August 2004)] Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II - Microstitching interferometry for nanofocusing mirror optics

Mimura, Hidekazu, Khounsary, Ali M., Dinger, Udo, Yumoto, Hirokatsu, Matsuyama, Satoshi, Ota, Kazuya, Yamamura, Kazuya, Sano, Yasuhisa, Ueno, Kazumasa, Endo, Katsuyoshi, Mori, Yuzo, Yabashi, Makina, T

Année:

2004

Langue:

english

Fichier:

PDF, 442 KB

english, 2004

31

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 1 August 2010)] Adaptive X-Ray Optics - The Naval Research Laboratory MEM adaptive optics program

Restaino, Sergio R., Khounsary, Ali M., O'Dell, Stephen L., Martinez, Ty, Andrews, Jonathan R., Restaino, Sergio R., Wilcox, Christopher C., Santiago, Freddie, Payne, Don M.

Année:

2010

Langue:

english

Fichier:

PDF, 19.18 MB

english, 2010

32

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 21 August 2011)] Advances in X-Ray/EUV Optics and Components VI - Dynamically-figured mirror system for high-energy nanofocusing at the ESRF

Barrett, R., Morawe, Christian, Khounsary, Ali M., Baker, R., Cloetens, P., Goto, Shunji, Dabin, Y., Morawe, C., Suhonen, H., Tucoulou, R., Vivo, A., Zhang, L.

Année:

2011

Langue:

english

Fichier:

PDF, 2.73 MB

english, 2011

33

SPIE Proceedings [SPIE Optics & Photonics 2005 - San Diego, California, USA (Sunday 31 July 2005)] Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II - A plane grating with single-layer coating for the sub-nanometer wavelength range

Bianco, Anna, Kyrala, George A., Gauthier, Jean-Claude J., Sostero, Giovanni, Nelles, Bruno, MacDonald, Carolyn A., Khounsary, Ali M., Heidemann, Klaus F., Cocco, Daniele

Année:

2005

Langue:

english

Fichier:

PDF, 413 KB

english, 2005

34

SPIE Proceedings [SPIE San Diego '92 - San Diego, CA (Sunday 19 July 1992)] High Heat Flux Engineering - Microchannel heatsink with liquid-nitrogen cooling

Riddle, Robert A., Bernhardt, Anthony F., Khounsary, Ali M.

Année:

1993

Langue:

english

Fichier:

PDF, 427 KB

english, 1993

35

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 29 July 2001)] Advances in Laboratory-based X-Ray Sources and Optics II - X-ray monochromator for divergent beam radiography using conventional and laser-produced x-ray sources

Schnopper, Herbert W., Romaine, Suzanne E., Krol, Andrzej, Khounsary, Ali M., MacDonald, Carolyn A.

Année:

2001

Langue:

english

Fichier:

PDF, 1.04 MB

english, 2001

36

SPIE Proceedings [SPIE Optics & Photonics 2005 - San Diego, California, USA (Sunday 31 July 2005)] Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II - Characterization of extreme ultraviolet (EUV) emission from xenon generated using a compact plasma-discharge source for lithography applications

Merabet, H., Kyrala, George A., Gauthier, Jean-Claude J., Bista, R., Schubert, C., MacDonald, Carolyn A., Khounsary, Ali M., Fuelling, S., Bruch, R., Godunov, A. L.

Année:

2005

Langue:

english

Fichier:

PDF, 289 KB

english, 2005

37

SPIE Proceedings [SPIE Optical Science, Engineering and Instrumentation '97 - San Diego, CA (Sunday 27 July 1997)] High Heat Flux and Synchrotron Radiation Beamlines - Parametric study of optical distortion due to window heating

Sutton, George W., Macrander, Albert T., Khounsary, Ali M.

Année:

1997

Langue:

english

Fichier:

PDF, 280 KB

english, 1997

38

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - Seattle, WA (Sunday 7 July 2002)] X-Ray Mirrors, Crystals, and Multilayers II - Mirrors for nanofocusing x-ray beams

Freund, Andreas K., Khounsary, Ali M., Ice, Gene E., Macrander, Albert T., Ishikawa, Tetsuya, Eng, Peter J., Wood, James L.

Année:

2002

Langue:

english

Fichier:

PDF, 275 KB

english, 2002

39

SPIE Proceedings [SPIE SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation - San Diego, CA (Sunday 11 July 1993)] High Heat Flux Engineering II - Critical heat flux of subcooled flow boiling with water for high heat flux application

Inasaka, Fujio, Nariai, Hideki, Khounsary, Ali M.

Année:

1993

Langue:

english

Fichier:

PDF, 540 KB

english, 1993

40

SPIE Proceedings [SPIE SPIE Optics + Photonics - San Diego, California, USA (Sunday 13 August 2006)] Advances in X-Ray/EUV Optics, Components, and Applications - Compact EUV source and optics for applications apart from lithography

Bayer, Armin, Khounsary, Ali M., Morawe, Christian, Barkusky, Frank, Peth, Christian, Töttger, Holger, Mann, Klaus

Année:

2006

Langue:

english

Fichier:

PDF, 1.47 MB

english, 2006

41

Calculation of wiggler spectrum and its absorption in media

Roger J. Dejus, Ali M. Khounsary, David A. Brown, P.J. Viccaro

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Année:

1992

Langue:

english

Fichier:

PDF, 670 KB

english, 1992

42

On diamond windows for high power synchrotron X-ray beams

Ali M. Khounsary, T.M. Kuzay

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Année:

1992

Langue:

english

Fichier:

PDF, 698 KB

english, 1992

43

At the limit of polychromatic microdiffraction

Gene E. Ice, Judy W.L. Pang, Bennett C. Larson, John D. Budai, Jonathan Z. Tischler, Jae-Young Choi, Wenjun Liu, Chian Liu, Lahsen Assoufid, Deming Shu, Ali Khounsary

Journal:

Materials Science and Engineering: A

Année:

2009

Langue:

english

Fichier:

PDF, 1.97 MB

english, 2009

44

Observation of a tilted Gaussian beam on the 7ID beamline of the advanced photon source

Eric M. Dufresne, Ali Khounsary

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Année:

2007

Langue:

english

Fichier:

PDF, 563 KB

english, 2007

45

Fabrication and evaluation of variable focus X-ray lenses

Ali Khounsary, Eric M. Dufresne, Cameron M. Kewish, Jun Qian, Lahsen Assoufid, Ray Conley

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Année:

2007

Langue:

english

Fichier:

PDF, 228 KB

english, 2007

46

A water-cooled X-ray monochromator for using off-axis undulator beam

Ali Khounsary, Jörg Maser

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Année:

2001

Langue:

english

Fichier:

PDF, 136 KB

english, 2001

47

SPIE Proceedings [SPIE Optics & Photonics - San Diego, CA (Sunday 13 August 2006)] Advances in X-Ray/EUV Optics, Components, and Applications - Optical constants in the EUV soft x-ray (5÷152 nm) spectral range of B4C thin films deposited by different deposition techniques

Monaco, G., Garoli, D., Frison, R., Mattarello, V., Nicolosi, P., Pelizzo, M. G., Rigato, V., Armelao, L., Giglia, A., Nannarone, S., Khounsary, Ali M., Morawe, Christian

Année:

2006

Langue:

english

Fichier:

PDF, 529 KB

english, 2006

48

SPIE Proceedings [SPIE Optical Science and Technology, the SPIE 49th Annual Meeting - Denver, CO (Monday 2 August 2004)] Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II - Moire interferometry formulas for hard x-ray wavefront sensing

Weitkamp, Timm, Diaz, A., Nohammer, Bernd, Pfeiffer, Franz, Stampanoni, Marco, Ziegler, Eric, David, Christian, Khounsary, Ali M., Dinger, Udo, Ota, Kazuya

Année:

2004

Langue:

english

Fichier:

PDF, 88 KB

english, 2004

49

[ Optics & Photonics - San Diego, CA (Sunday 13 August 2006)] - Film stress studies and the multilayer Laue lens project

Liu, Chian, Conley, R., Macrander, A. T., Khounsary, Ali M., Morawe, Christian

Langue:

english

Fichier:

PDF, 174 KB

english

50

SPIE Proceedings [SPIE Optical Science and Technology, the SPIE 49th Annual Meeting - Denver, CO (Monday 2 August 2004)] Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II - A reflectance measurement system for investigating radiation damage to EUVL mirrors in NewSUBARU

Kakutani, Yukinobu, Niibe, Masahito, Kakiuchi, Kazuya, Takase, Hiromitsu, Terashima, Shigeru, Kondo, Hiroyuki, Matsunari, Shuichi, Aoki, Takashi, Gomei, Yoshio, Fukuda, Yasuaki, Khounsary, Ali M., Din

Année:

2004

Langue:

english

Fichier:

PDF, 435 KB

english, 2004